Philip D. Rack |
UT office (865)
974-5344 ORNL office (865) 241-1598 fax (865) 974-4115 |
My specific research interests are in thin film materials and nanoscale processing for advanced materials and devices. While my research program has and continues to evolve, my research program can be divided into three focus areas, namely:
Simulated electron beam induced deposition tungsten nanopillar from a WF6 precursor. The red spheres represent atoms deposited by primary electrons, green spheres are atoms deposited from forward scattered electrons, yellow spheres are atoms deposited from secondary electrons, and blue spheres are atoms deposited from backscattered electrons. (see Fowlkes et al.)