Philip D. Rack

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L.R. Baylor, W.L. Gardner, X. Yang, R.J. Kasica, M.A. Guillorn, B. Blalock, D.K. Hensley, S. Islam, D.H. Lowndes, A.V. Melechko, V.I. Merkulov, D.C. Joy, P. D. Rack, M.L. Simpson, D. K. Thomas, Initial Lithography Results from the Digital Electrostatic e-beam Array Lithography (DEAL) Concept, Journal of Vacuum Science and Technology B, vol. 22 no. (6) pp. 3021-3024 (Nov/Dec 2004).

publications/aip_papers/Baylor_2004_Initial.pdf

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