Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

Melechko, A.V., T.E. McKnight, M.A. Guillorn, V.I. Merkulov, B. Ilic, M.J. Doktycz, D.H. Lowndes, and M.L. Simpson

We report a method to fabricate nanoscale pipes ("nanopipes") suitable for fluidic transport. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to several micrometers that are oriented perpendicular to the substrate. This method provides a high level of control over the nanopipe location, number, length, and diameter, permitting them to be deterministically positioned on a substrate and arranged into arrays. ©2003 American Institute of Physics.  

The following article appeared in Applied Physics Letters -- February 10, 2003 -- Volume 82, Issue 6, pp. 976-978   and may be found at (URL/link for published article abstract).

Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.