Characterisation of reactively sputtered silicon oxide for thin-film transistor fabrication

Melechko home
   Publications
    Jouranal articles

Jun, S.-I., T.E. McKnight, A. V. Melechko, M. L. Simpson, P. D. Rack.,
Electron. Letts. 41 (14), July 7, 2005, 59-60

Abstract