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(Full
text PDF) Reused with permission from M. A. Guillorn,
Journal of Vacuum Science & Technology B, 22, 35 (2004). Copyright 2004,
AVS The Science & Technology Society.
M. A. Guillorn, X. Yang, A. V. Melechko, D. K. Hensley, M. D. Hale, V.
I. Merkulov, and M. L. Simpson
Molecular-Scale Engineering and Nanoscale Technologies Research Group,
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
L. R. Baylor and W. L. Gardner
Fusion Energy Division, Oak Ridge National Laboratory, Oak Ridge,
Tennessee 37831
D. H. Lowndes
Thin Film and Nanostructured Materials Physics Research Group, Solid
State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee
37831
(Received 10 May 2002; accepted 20 October 2003; published 24 December
2003)
We report on the design, fabrication, and initial characterization of
vertically aligned carbon nanofiber-based microfabricated field emission
devices with an integrated out-of-plane electrostatic focusing
electrode. The potential placed on this electrode was found to have a
profound impact on the diameter of the beam emitted from the device as
observed on a phosphor screen. Aspects of the device fabrication process
and device operation are discussed. The experimental results obtained
are compared to a numerical simulation of device performance and found
to be within good agreement. ©2004 American Vacuum Society.
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