Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures
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    Journal articles		   The following article appeared in Applied Physics Letters -- February 10, 2003 -- Volume 82, Issue 6, pp. 976-978   and may be found at (URL/link for published article abstract).

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Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

A. V. Melechko, T. E. McKnight, M. A. Guillorn, and V. I. Merkulov
Molecular-Scale Engineering and Nanoscale Technologies Research Group, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
B. Ilic
School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853
M. J. Doktycz
Life Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
D. H. Lowndes
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
M. L. Simpson
Molecular-Scale Engineering and Nanoscale Technologies Research Group, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831

 

(Received 1 August 2002; accepted 16 December 2002)

We report a method to fabricate nanoscale pipes ("nanopipes") suitable for fluidic transport. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to several micrometers that are oriented perpendicular to the substrate. This method provides a high level of control over the nanopipe location, number, length, and diameter, permitting them to be deterministically positioned on a substrate and arranged into arrays. ©2003 American Institute of Physics.